Radial line slot antenna plasma

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A Model for Antenna-Plasma Wave Co upling towards Control ...

Trials of RF plasma production using different antenna geometries with magnetic ﬁeld Shunjiro Shinoharayand Tsutomu Soejima Interdisciplinary Graduate School of Engineering Sciences, Kyushu University, Kasuga, Fukuoka 816-8580, Japan Received 1 June 1998, in ﬁnal form 18 September 1998 Abstract. Plasma production studies excited by the ... Floating potential measurements in the near field of an ion ... Characteristics of large-diameter plasma using a radial-line slot antenna J. Vac. Sci. Technol. A 24, 1421 (2006) Outgassing of lower hybrid antenna modules during high-power long-pulse transmission J. Vac. Sci. Technol. A 23, 55 (2005) High-density etching plasma excitation by slot type and coaxial line type of microwave antennas US Patent for Plasma processing apparatus and plasma ...

A rotating mode radial line slot antenna (RLSA) with densely arrayed slots has already been proposed for plasma processing system and the basic characteristics were confirmed.

Radial line slot antenna having a conductive layer - Tokyo ... The plasma source 130 comprises a surface wave plasma (SWP) source, such as a radial line slot antenna (RLSA), to be discussed below. As seen in FIG. 1A, the plasma processing system 100 comprises a gas supply system 135 coupled to the processing chamber 110 and configured to introduce a process gas to process space 115. During dry plasma ...

A Circularly Polarized Radial Line Dielectric Resonator Antenna Array

Radial Line Slot Antenna Design for Monopulse Space Debris Radar radial line slot antenna for this application. Previous studies were presented in [2]. In that paper, the idea of the monopulse antenna was implemented at Ku band. However, there was not an optimization process of the slot (position and length). This paper shows the optimization process for the slot arrangement Design Method, Analysis and Prototypes of Radial Line Slot ...

Our research themes are planar slotted waveguide antennas and electromagnetic theory. ... Plasma Etching. ... collaboration with TOKYO ELECTRON (TEL) SSPS * *SSPS: Space Solar Power System. A Radial Line Slot Antenna Fed by a Rectangular Waveguide through a Crossed Slot (5.8GHz, 23dBi, 300W) collaboration with IHI and Kyoto University.

RLSA microwave plasma processing apparatus, a number of slots planar antenna is formed in a predetermined pattern on the top of the chamber (Radial Line Slot Antenna) is provided, the microwaves guided from the microwave generating source... A Stable Design of Coaxial Adaptor for Radial Line Slot … A new design of feed for radial line slot antenna (RLSA) is presented. For better impedance match to the waveguide the effect of the various feed parameters is analyzed and their design sensitivity is studied. This paper emphasizes the advantages of using feed with a funnel below the connector entry... TEL Release TriasTM SPA Plasma Processing System Capable… Based on the Radial Line Slot Antenna (RLSA) microwave plasma developed for semiconductor processes by Professor Tadahiro Ohmi at Tohoku University, the Trias SPA uses the unique Slot Plane Antenna (SPA) plasma generating technology established by TEL... Radial line slot antenna

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Our research themes are planar slotted waveguide antennas and electromagnetic theory. Plasma Etching. ... collaboration with TOKYO ELECTRON (TEL) SSPS * *SSPS: Space Solar Power System. A Radial Line Slot Antenna Fed by a Rectangular Waveguide through a Crossed Slot (5.8GHz, 23dBi, 300W) collaboration with IHI and Kyoto University. Large-area plasma excitation in densely arrayed radial A novel feeding structure using a TE11 (transverse electric) rotating mode in a radial line slot antenna for plasma production is proposed. Moreover, novel slot patterns with different coupling slot distributions are fabricated and tested. Extremely uniform plasma over a large diameter is observed and the possibility of control of the plasma distribution in the radial direction by changing to 'HVLJQRI5DGLDO/LQH6ORW$QWHQQDVDW *+]IRU /DUJH plasma diffuses into the wafer surface through a wide process space, and uniform density is realized over the entire wafer surface. They cannot be applied to high speed processes for large-diameter-wafers (300 mm), because of the wide process space. A radial line slot antenna (RLSA) is a waveguide planar A tunable microwave slot antenna based on graphene The radial line slot antenna plasma source is a high-density microwave plasma source comprising a high electron temperature source region within the plasma skin depth from a coupling window and low electron temperature diffusion region far from the window. The plasma is typically comprised of inert gases like argon and mixtures of halogen or